Study of Electrostatic Actuator Voltage Reduction with a Tri-Electrode Actuator with Varying Pull-Down Voltage
نویسندگان
چکیده
منابع مشابه
Reduction of Electrostatic Control Voltage with a Tri - Electrode Actuator †
We present a new tri-electrode topology for reducing the control voltage for electrostatic actuators. Conventional parallel plate actuators are dual-electrode systems, formed by the MEMS structure and the drive electrode. By placing a perforated intermediate electrode between these elements, a tri-electrode configuration is formed. This topology enables a low voltage on the intermediate electro...
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ژورنال
عنوان ژورنال: Proceedings
سال: 2018
ISSN: 2504-3900
DOI: 10.3390/proceedings2130928